In situ analysis of individual fluid inclusions has become a popular program in the study of inclusions, which can be used to trace the evolved process of the fluid. This paper sheds light onto recent progresses in the microanalysis methods which including synchrotron radiation X-ray fluorescence, protoninduced X-ray emission, Raman microspectroscopy, FTIR microspectroscopy and infrared microscope.The practical aspects of these methods, such as limits and applied scopes, was discussed in this paper. The selection of the methods in the study of inclusions is based on considerations such as characteristics of the analysis methods, the information of inclusions, and the information of the matrix and inclusions itself.