收稿日期: 2006-04-12
修回日期: 2006-09-12
网络出版日期: 2006-10-15
基金资助
教育部博士点基金项目（编号：20040491003）；国家自然科学基金项目“辽南变质核杂岩的组成、结构与区域构造内涵”（编号：40472105）资助.
Modern Techniques for the Analysis of Rock Microstructure：EBSD and Its Application
Received date: 2006-04-12
Revised date: 2006-09-12
Online published: 2006-10-15
EBSD技术的发展，为岩石显微构造分析开辟了一个全新的领域。它与现代扫描电子显微镜和能谱分析等设备配合，可以同时对块状样品进行晶体结构与成分分析,从而使显微构造、微区成分与结晶学数据分析有机结合起来。
EBSD技术可以精确、快速定量标定包括各种晶系晶体颗粒的晶格方位和描述晶体颗粒的边界、形态等特征，对于具有低角度边界的晶体颗粒提供精确数据,为阐述岩石变形机制提供重要约束，并为高级晶族和不透明矿物结晶学组构与变形机制研究提供了有效的手段。EBSD尤其使获取微米级甚至纳米级尺度上颗粒（亚颗粒）或相之间的定向差别（达到20 nm的空间分辨率和0.3度角度分辨率）成为可能。EBSD技术在矿物相鉴定、亚微域内的应变分析、矿物出溶作用等方面的应用，进一步证明了这一新技术在显微构造分析及相关领域的应用前景。其广泛应用必将带来岩石显微构造研究的新突破，也将成为未来岩石变形机制与岩石圈流变学研究取得飞速发展不可或缺的技术手段。
曹淑云 , 刘俊来 . 岩石显微构造分析现代技术——EBSD技术及应用[J]. 地球科学进展, 2006 , 21(10) : 1091 -1096 . DOI: 10.11867/j.issn.1001-8166.2006.10.1091
The application of EBSD (electron backscatter diffraction) technique has pioneered a brand-new field of microstrucutral analysis of rocks. In combination of the application of other attachments (e.g. EDS) of SEM, the EBSD technique could provide chances for integrated studies of rock microstructures, compositions and crystallographic framework in micro-field.
With EBSD technique can precisely and rapidly determine the crystallographic orientations and describe grain boundaries of crystal grains, and provide crystallographic data for grains with low angle grain boundaries. Such data further provide constraints for deformation mechanisms of rock deformation. The EBSD technique is also a powerful technique for the study of crystallographic textures and deformation mechanisms of high crystal category and opaque minerals. Very fine grains (or subgrains) with sizes of micron to nano scales are easily obtained with the EBSD technique (of about 20 nm spatial and 0.3° angular resolutions).
The EBSD technique is also widely applied to phase identification, microstrain analysis and mineral exsolution analysis, suggesting wider application of the technique in microstructural analysis and related field. A breakthrough of microstructural analysis of rocks is expected with wide application of EBSD techniques. EBSD will become an indispensable technique which enhances rapid development of deformation mechanisms of rocks and rheology of the lithosphere.
Key words： Electron backscatter diffraction; Rocks; Microstructure.
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